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CVD-SiC

Overview

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For the IBIDEN SiC coat, a thin film of silicon carbide is applied to the surface of the graphite base material by chemical vapour deposition (CVD).

Characteristics

Many possible usage environments

The silicon carbide coat has excellent heat resistance and can be used in a wide temperature range. Also its acid resistance and corrosion resistance are excellent, that is why it can be used in acidic environments or environments with corrosive gases.

No contamination of the operating environment

The adsorption and emission of impurity gas is low, and due to the high wear resistance there are no particle emissions that could contaminate the operating environment.

Function

By using a graphite raw material with controlled particle properties as graphite base material, we create a product that after the SiC coating has great uniforminty and the ability to withstand temperature fluctuations.

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Specifications of the SiC coating

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Material properties of the SiC coating

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Adhesion of the SiC coat to the graphite base material

The unique pre-processing technique of the IBIDEN SiC coating improves the adhesion of the coat to the base material significantly. As a result of the pre-processing, the adhesion can be increased by a factor of 1.3.

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